发明名称 Assembly line processing method
摘要 An apparatus for sequential processing of a workpiece comprises an assembly line processing system. The apparatus comprises multiple workpieces moving in an assembly line fashion under multiple process stations. The multiple process stations provide different processes onto the workpieces for a sequential processing of the workpieces. The sequential processing action is carried out by the movement of the workpieces under the various process stations.
申请公布号 US7153542(B2) 申请公布日期 2006.12.26
申请号 US20020212546 申请日期 2002.08.06
申请人 TEGAL CORPORATION 发明人 NGUYEN TUE;NGUYEN TAI DUNG;BERCAW CRAIG ALAN
分类号 B05D1/38;C23C14/54;C23C16/44;C23C16/458;C23C16/52;C23C16/56;H01L21/00 主分类号 B05D1/38
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