| 摘要 |
A thermal actuator for micro electro-mechanical device comprises a first conductively heatable arm (30) attached at one end to a substrate (31), with a cross sectional profile along its length dimensioned so as to increase therm al heating of the arm (30) adjacent to the substrate (31). In particular, one o r more heat sink regions (38) and/or regions of increased thickness along the arm (30) provide a more uniform heating profile, which improves bending efficiency. In one embodiment the actuator controls an ejection paddle (32) in an ink jet nozzle chamber.
|
