| 摘要 |
A thermal process apparatus is provided to reduce working time in installing a process tube and loss due to an alignment defect by checking an exact setting of the process tube through an opening of a second thermal insulating block. Plural substrates are arranged in a process tube(110). A cylindrical heater unit(150) is arranged at the outside of the process tube to heat. A thermal insulating member(130) is installed at the circumference of the heater unit to block an exhaust of the heat generated from the heater unit to the outside. The thermal insulating member includes a first cylindrical thermal insulating block(132). A second thermal insulating block(134) has an opening unit for seeing the inside of the heater unit. The first thermal insulating block is installed at a side of the heater unit. The second thermal insulating block is installed on an upper portion of the first thermal insulating block. The third thermal insulating block opens and shuts the opened opening unit of the second thermal insulating block.
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