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发明名称
VERFAHREN UND SYSTEM ZUR REINIGUNG EINES WAFERS NACH CHEMISCH- MECHANISCHEM POLIEREN ODER PLASMABEHANDLUNG
摘要
申请公布号
AT345579(T)
申请公布日期
2006.12.15
申请号
AT20000943063T
申请日期
2000.06.23
申请人
LAM RESEARCH CORPORATION
发明人
FARBER, JEFFREY, J.;SVIRCHEVSKI, JULIA, S.
分类号
H01L21/304;H01L21/00;(IPC1-7):H01L21/00
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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