发明名称 Retaining ring with flange for chemical mechanical polishing
摘要 A retaining ring has a generally annular body with a top surface, a bottom surface, an inner diameter surface, and an outer diameter surface. The outer diameter surface includes an outwardly projecting flange having a lower surface, and the bottom surface includes a plurality of channels.
申请公布号 US2006281395(A1) 申请公布日期 2006.12.14
申请号 US20060506477 申请日期 2006.08.17
申请人 APPLIED MATERIALS, INC. 发明人 MAROHL DAN A.;TSENG MING-KUEI
分类号 B24B21/18;B24B37/04;B24B41/06;H01L21/306 主分类号 B24B21/18
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