| 摘要 |
<P>PROBLEM TO BE SOLVED: To realize an angular velocity detection sensor for detecting Coriolis forces in at least two or three axial directions by forming a crystal Z plate by etching to mechanically together join inertia sensor elements each detecting Coriolis force in only one axial direction. <P>SOLUTION: In this inertia sensor element, a tuning fork-shaped crystal vibrating reed is excited with the center part of the vibrating reed used as a rotation axis and Coriolis force is detected through the generation of torque around the rotation axis, thereby obtaining angular velocity. As to the inertia sensor elements, one inertia sensor element is disposed at least in two directions, or X-axis and Y-axis directions, having a structure with the element partly put to joint, and another is disposed also in the Z-axis direction, thus allowing angular velocities to be obtained for detecting Coriolis forces in three directions including X-axis and Y-axis directions. Respective elements are mechanically unified with each other by direct joint and the elements are combined at will with each other depending on the number of detecting direction components. <P>COPYRIGHT: (C)2007,JPO&INPIT |
