| 摘要 |
A rotary rinser 1 which injects dual fluids includes a rotary valve 11 in which an admixture of one of the fluids into the other fluid is prevented. A stationary valve member 28 is formed with a chemical liquid supply passage 60 and an air supply passage 48 while a rotary valve member 16 is formed with a chemical liquid discharge passage 18 and an air discharge passage 24. As the rotary valve member 16 rotates, a supply passage and a discharge passage for each fluid move into and out of communication. Sliding surfaces into which the chemical liquid passages 60 and 22 a open (sliding surfaces of a chemical liquid stator 34 and a chemical liquid distributor 22 ) and sliding surfaces through which the air passage 48 and 24 move into and out of communication (sliding surfaces of the rotary valve member 16 and the air distributor 49 ) are disposed at different radial positions and at different elevations.
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