| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a piezoelectric vibration element itself is largely distorted and piezoelectric vibration characteristic may be deteriorated because an external stress such as bending is applied to the piezoelectric vibration element, when a vibration frequency desired for a piezoelectric vibrator is an ultra-high frequency, the thickness of the piezoelectric vibration element must be very thin, and when such a thinned piezoelectric vibration element is used for a piezoelectric vibrator having a conventional structure. SOLUTION: A piezoelectric vibration element is arranged on an element holding substrate. This element holding substrate has an insulation substrate connected and held with a surrounding frame and a plurality of bridges integrally formed, a first container having a first concave portion formed on one main surface of the insulation substrate, and a second container having a second concave portion formed on the other main surface of the insulation substrate arranged thereon. In the element holding substrate, the first and second containers and the insulation substrate are hermetically bonded, and an excitation electrode of the piezoelectric vibration element is electrically connected to an external connection electrode terminal of the second container. COPYRIGHT: (C)2007,JPO&INPIT
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