| 摘要 |
A lower electrode 3 including a low-temperature melting layer 3 A and a high-temperature melting layer 3 B having mutually different melting-start temperatures is provided between a vibration plate 2 and a piezoelectric layer 4 . In a calcination step of calcinating the lower electrode 3 , the calcination is performed at a low temperature at which only the low-temperature melting layer 3 A melts, and in an annealing-process step of the piezoelectric layer 4 , the annealing process is performed at a high temperature at which the high-temperature melting layer 3 B melts. At this time, in the calcination step, the melting of platinum nano-particles occurs in the low-temperature melting layer 3 A, rendering the adhesion and diffusion-preventive effect. Further, in the annealing step, in the high-temperature melting layer 3 B, platinum particles are melted, rendering the adhesion and diffusion-preventive effect. The degradation of piezoelectric characteristics of the piezoelectric actuator can be suppressed by the annealing process.
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