| 摘要 |
A thermal anemometer for measuring airflow includes an ovenized semiconductor device including an internal oven. The oven is powered by an oven current such that the oven current varies with air flow over an outside surface of the semiconductor device. A resistor is electrically coupled between a source of power and the oven. An amplifier has an amplifier input and an amplifier output. The amplifier input is electrically coupled to the oven, wherein the amplifier output amplifier provides an electrical signal related to airflow over the ovenized semiconductor device. Also, a method for measuring airflow includes the steps of: providing a source of power, providing an ovenized semiconductor device, providing an amplifier, amplifying a signal representative of a heater current in the ovenized semiconductor device, and outputting the signal representative of the heater current as an indication of airflow over an outside surface of the ovenized semiconductor device.
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