| 摘要 |
The invention concerns a gas controlling device (1) comprising an axial protuberance (5) limited by a sealed peripheral wall (6) permeable to magnetic fields and connected to a chamber such as a processing chamber (11) wherein are present gaseous species to be controlled. A light radiation sensor (3) is arranged at the end of the chamber axial protuberance (5), and enables light to be transported via an optical fiber (4a) to an optical spectrometer (4). A plasma generator (17, 18) generates a control plasma (16) in the inner space (8) of the chamber axial protuberance (5). One or several magnets (7, 7a) are arranged outside the peripheral wall (6) of the chamber axial protuberance (5) and generate a magnetic field (9) proximate the sensor (3) to form a magnetic barrier preventing ionized particles of the control plasma (16) from being propagated towards the sensor (3), thereby preventing the sensor (3) and the chamber from being fouled. |
