| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a quartz vibrator consisting of a vibration section of a thin-piece vibration blank plate and a reinforcing section surrounding it, and to provide the vibrator. <P>SOLUTION: In order to achieve the above purpose, the method of manufacturing the quartz vibrator, in which the vibration section of the quartz thin and blank plate having many pieces of quartz vibrators formed on one wafer and reinforcing section surrounding it are integrally formed, has a process of forming an electrode on a vibration region of the quartz thin and blank plate; a process of masking a vibration portion including the electrode of the thin-piece blank plate; a process of vapor depositing a desired thickness oxide silicon on the vicinity of the masking portion of the thin-piece blank plate; and an a process of peeling the masking portion from the thin-piece blank plate. Photolithography is used to mask the resonating region of the thin-piece blank plate, and the oxide silicon vapor depositing layer for surrounding the vibrator for surrounding the vibrator is deposited and formed on the quartz thin and blank plate having a portion where an electrode to be formed and is used as a vibration portion. Thus, the above problem is solved. <P>COPYRIGHT: (C)2007,JPO&INPIT |
