发明名称 DISPENSE GEOMETRY AND CONDUCTIVE TEMPLATE TO ACHIEVE HIGH-SPEED FILLING AND THROUGHPUT
摘要 <p>The present invention is directed to a method that employs a dispense geometry, a conductive template (26) with molds or recesses (28) having "surface (28)", to treat deposits on substrate (30) surface (30a), and a method of forming the conductive template to achieve high-speed filling and throughput during imprint lithography processes.</p>
申请公布号 KR20060126967(A) 申请公布日期 2006.12.11
申请号 KR20067009140 申请日期 2006.05.11
申请人 MOLECULAR IMPRINTS, INC. 发明人 SREENIVASAN SIDLGATA V.;MCMACKIN IAN M.;CHOI, BYUNG JIN;VOISIN RONALD D.
分类号 H01L21/027;G03F 主分类号 H01L21/027
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