| 摘要 |
<p>A method and system for correcting a fault in a semiconductor manufacturing system is described. Fault correction for a service component is achieved using an interactive case study with a service operator. The interactive case study can identify one or more cases where the current service activity data substantially matches past service activity data, and utilize this correlation to assist the service operator in conducting the service component repair. If necessary, the interactive case study can identify one or more tests to perform in order to narrow down the number of matching cases. As tests are performed and results are retrieved by the interactive case study, the number of matching cases is reduced. For instance, the interactive case study can assist in identifying a manufacturing system part to replace in a manufacturing system tool in order to correct the problem.</p> |
