| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide pinchers which can positively pinch an object without breaking the same, and to provide a pinching device using the same and a pinching method. <P>SOLUTION: The pinchers or micro-tweezers 10 are formed of a pair of support bodies 11, and holding portions 12 each arranged at the tip of the support body 11 and deformed upon application of voltage thereto. The pinching device is formed of a stage on which a substrate is rigidly mounted, the micro-tweezers 10 arranged over the stage, a voltage applying section for applying voltage to the micro-tweezers 10, and a driving section for moving the stage or the voltage applying section to adjust locations of the stage and the micro-tweezers 10. The pinching method is implemented by using the micro-tweezers 10. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
