MEASUREMENT METHOD FOR GAP BETWEEN SUBSTRATE AND MASK, GAP MEASUREMENT MEANS, AND PRINTER

摘要

PROBLEM TO BE SOLVED: To provide a measurement means for a gap between a substrate and a mask for automatically eliminating the gap between the substrate and the mask. SOLUTION: This means is used for measuring the gap between the substrate and the mask in a printer 1. The printer 1 is equipped with a stage 3 for supporting a peripheral part of the mask 2 for printing an electrical circuit on the substrate K and a substrate support table 5 for ascending/descending the substrate mounted thereon at a position below a printed part of the mask 2 supported on the stage. This means is equipped with a pressure sensor 14, communicating with substrate suction holes 12 opening in the surface of the support table. This means is equipped with a position detector 21 for detecting the height of the support table when the degree of vacuum, caused by the pressure sensor becomes a prescribed value or more in bringing the support table close to the mask supported on the stage, and an arithmetic part 22 for finding a difference between the height detected by the position detector and a reference height of the support table. COPYRIGHT: (C)2007,JPO&INPIT