| 摘要 |
The present invention is directed to realize accurate positioning of a slotted plate. Disclosed is a thin plate supporting container having a container body for housing therein semiconductor wafers, a lid unit for closing the container body, and slotted plates for supporting the semiconductor wafers from both sides. There are provided an upper fitting portion for supporting an upper portion of the slotted plate, and a lower fitting portion for supporting a lower portion of the slotted plate. An upper fitting piece of the upper fitting portion has a contact face having a flat plane shape which comes into contact with the slotted plate side to thereby position the slotted plate in the front/rear direction while suppressing swing of the slotted plate, and a supporting face. The upper receiving piece has a face to be contacted having a flat plane shape, and a face to be supported. The lower fitting portion has vertical-direction positioning means for positioning the semiconductor wafer in the vertical direction, horizontal-direction positioning means for performing positioning in the horizontal direction, and a front/rear-direction positioning means for performing positioning in the front/rear direction.
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