发明名称 PIEZOELECTRIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a piezoelectric device capable of obtaining a prescribed vibration frequency wherein a fixing agent is not adhered to a piezoelectric resonator element when the piezoelectric resonator element is fixed to a substrate. SOLUTION: The piezoelectric device 10 comprises the piezoelectric resonator element 30 including: a base part 31; a pair of vibration arms 32, 33 extended from one end of the base part 31; a pair of vibrator support arms 38, 39 extended to both sides of vibration arms 32, 33 in parallel from the other end of the base part 31, and a package 20 for housing the piezoelectric resonator element 30, and it is characterized in that a bottom part of a cavity S formed to the package 20 comprises: a pair of piezoelectric resonator element support faces 22a, 22b formed at both outsides of the vibration arms 32, 33 in parallel in the length direction; and a recessed part 26 whose width is wider than the vibration regional range of the vibration arms 32, 33 provided to inside the piezoelectric resonator element support faces 22a, 22b, and the vibrator support arms 38, 39 are fixed to the piezoelectric resonator element support faces 22a, 22b by a conductive adhesive 70. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006332727(A) 申请公布日期 2006.12.07
申请号 JP20050149104 申请日期 2005.05.23
申请人 SEIKO EPSON CORP 发明人 HIRASAWA NORIYA
分类号 H03H9/10;H01L41/09;H01L41/18;H03H9/02 主分类号 H03H9/10
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