WAFER CONVEYOR, WAFER LAMINATION CONVEYOR AND METHOD FOR MANUFACTURING LAMINATED SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide wafer holders suitable for holding and transferring wafers at the same time, and to provide a method for manufacturing laminated semiconductor devices. SOLUTION: The wafers to be laminated are held by the wafer holders having the function of electrostatic adsorption. The wafers to be laminated are brought close to each other and are brought into contact with each other. Then a voltage is applied between their wafer holders for temporarily fixing the wafers by electrostatic adsorption power. Power supplies are incorporated in the wafer holders for transferring the temporarily fixed wafers and the wafer holders. COPYRIGHT: (C)2007,JPO&INPIT