发明名称 ELECTRON BEAM DEFLECTING DEVICE
摘要 PURPOSE:To remove the effect of a field controller (FC) by arranging the 2-pole magnet in the 2-, 4-, and 6-pole magnets which constitute a static concergence magnet (STC-MAG) at the position separated farest from the field controller. CONSTITUTION:A 2-pole magnet is arranged at the position of the magnet 14 in the three sets of magnets 12, 13, and 14 which constitute a STC-MAG3. Since this permits the distance between the magnets 12 and 14 is about 20mm in general, the magnetic field of the 2-pole magnet is hardly distubed by the FC11 and 11'. The misconvergence of the central beam is also actually out of question.
申请公布号 JPS55126947(A) 申请公布日期 1980.10.01
申请号 JP19790034421 申请日期 1979.03.26
申请人 HITACHI LTD 发明人 NIITSU ICHIROU;YOSHIKAWA YOSHIO;ABE MASAYUKI;YOKOMATSU ETSUO
分类号 H01J29/54;H01J29/70 主分类号 H01J29/54
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