| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact sensor module having high functions and high performance that is laminated with a sensor and an integrated circuit, without influencing the sensor performance. SOLUTION: The sensor and the integrated circuit are laminated or combined via an interposer. This provides functions related to the reliability to the integrated circuit or the interposer, which is represented by a regulation plate in an acceleration sensor, and then the very compact sensor module having high performance and high reliability can be obtained. COPYRIGHT: (C)2007,JPO&INPIT
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