| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing and washing method and an apparatus which can perform barrel polishing and washing processes thereafter all together. SOLUTION: The polishing and washing method is equipped with: processing tanks 1-3 rotating barrels BA1-BA3 stored with processing articles in a state of being immersed in a washing liquid to fluidize the processing articles with media; an idle turning mechanism RT(H) holding and rotating the barrels BA1-BA3 in a state of not contacting with the washing liquid; liquid tanks TK1-TK3 connected to the processing tanks 1-3; and a circulation mechanism for circulating the washing liquid between the liquid tanks TK1-TK3 and the respective processing tanks 1-3. The respective barrels BA1-BA3 are provided with through holes HO through which polishing waste can be freely passed, thereby effectively discharging the polishing waste. The discharged polishing waste is captured by the circulation mechanism. COPYRIGHT: (C)2007,JPO&INPIT
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