| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an industrially advantageous method in which contaminants are removed from a chlorosilane circulation system producing trichlorosilane when silicon is produced from trichlorosilane by a vapor deposition method. <P>SOLUTION: In the vapor deposition method of silicon, semiconductor grade silicon is produced while producing solar cell grade silicon by converting a portion of trichlorosilane into the solar cell class silicon. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
