SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

摘要

A semiconductor device and its manufacturing method are provided to economize fabrication costs and to reduce device size by embodying micro-machine composed of a micro-structure and a semiconductor element on the same insulating substrate. A semiconductor device includes an electric circuit and a micro-structure. The electric circuit is formed on a substrate, wherein the electric circuit includes a semiconductor element. The micro-structure(119) is formed on the same substrate. The micro-structure includes a polycrystalline silicon layer. The polycrystalline silicon layer is obtained from a laser crystallization or thermal crystallization.