HYDROGEN GAS DETECTION SENSOR AND METHOD FOR MANUFACTURING IT

摘要

PROBLEM TO BE SOLVED: To provide a hydrogen gas detection sensor capable of reducing variations in electric conductivity and stably detecting the leakage of hydrogen gas. SOLUTION: In the hydrogen gas detection sensor, a detection film 3 overlies a substrate 1 is constituted of both catalyst particles 19 which act in such a way as to adsorb hydrogen gas and dissociate it into protons (H+) and electrons (e) and metal oxide particles 18 of which the electric conductivity increases due to reaction with the protons (H+) and the electrons (e) generated by the catalytic action. The metal oxide particles 18 have a structure for dispersively carrying the catalyst particles 19 having a smaller diameter than that of the metal oxide particles 18. An area ratio between the surface area of a substrate in which the detection film 3 overlies the substrate 1 and the area of a substrate exposed due to the absence of the overlying detection film 3 in the surface area of the substrate is 4% or less. COPYRIGHT: (C)2007,JPO&INPIT