RIBBON CABLE IN CMP APPARATUS FOR SEMICONDUCTOR DEVICE MANUFACTURING

摘要

A ribbon cable of a CMP apparatus for manufacturing a semiconductor device is provided to prevent failure in a robot rotating process by forming a protective layer with a rubber material. A ribbon cable of a CMP apparatus for manufacturing a semiconductor device is characterized in that an elastically protective layer(102) is formed at both side regions of a ribbon cable(100). The ribbon cable is formed with a z-axis ribbon cable or a wrist ribbon cable. The protective layer is formed with a rubber material. The protective layer formed with the rubber material having an elastic characteristic is formed on the entire region of the ribbon cable.