| 摘要 |
FIELD: microprocessed structures and methods for their manufacture. ^ SUBSTANCE: a method for manufacture of elastomeric structure is found, it includes formation of the first elastomeric layer from above the first microprocessed structure. The first microprocessed structure has the first shoulder, which forms the first recess stretching along the lower surface of the first elastomeric layer. Formation of the second elastomeric layer is accomplished from above the second microprocessed structure. The second microprocessed structure has the second shoulder, which forms the second recess stretching along the lower surface of the second elastomeric layer. The lower surface of the second elastomeric layer is connected to the upper surface of the first elastomeric layer so as to form a control channel in the second recess between the first and second elastomeric layers, and position the first elastomeric layer from above the planar base so as to form a channel in the first recess between the first elastomeric layer and the planar base. The methods of manufacture of the microprocessed structure are described. ^ EFFECT: enhanced reliability of the microprocessed structure. ^ 36 cl, 49 dwg |
