发明名称 COLOR FILTER, MANUFACTURING METHOD THEREOF, SOLID-STATE IMAGING ELEMENT, AND MANUFACTURING METHOD THEREOF
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a color filter capable of realizing thinning and of preventing color mixing. <P>SOLUTION: After forming color filters 50B of B (FIG. 4(a)), a color filter 50R of R is formed between the color filters 50B of B (FIG. 4(b)), and thereafter a color filter 50G of G is formed between the color filters 50B of B (FIG. 4(c)). There are removed the color filter 50R of R and the color filter 50G of G located at a position higher than the surface of a flattened film 74 of the color filter 50B of B by performing CMP processing from the state illustrated in FIG. 4(c). <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2006319133(A) 申请公布日期 2006.11.24
申请号 JP20050140167 申请日期 2005.05.12
申请人 FUJI PHOTO FILM CO LTD 发明人 HACHITANI TORU
分类号 H01L27/14;G02B5/20 主分类号 H01L27/14
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