BAKE USING AN ELECTROMAGNETIC WAVE AND METHOD THEREOF

摘要

A bake apparatus using electromagnetic waves and a baking method thereof are provided to heat a wafer uniformly by generating the electromagnetic waves having a wavelength band which is readily absorbed into the wafer. A bake apparatus includes a chamber(10) and an oscillation unit(11). The oscillation unit is installed at the chamber to generate electromagnetic waves having a wavelength band which is readily absorbed into a wafer(W). The bake apparatus further includes a power supply unit(20) for supplying a voltage to the oscillation unit and a control unit(30) for controlling a voltage supply time of the power supply unit to change the baking temperature of the wafer. The bake apparatus further includes a timer(40) for providing timing information to the control unit.