A system and apparatus for the delivery of a high purity carbon dioxide fluid is provided. The system includes at least two separate semiconductor applications (6, 14), wherein one of said applications requires refrigeration. A first portion of the carbon dioxide stream is drawn off the supply line (1) and directing it to a first semiconductor application (6). A second portion is drawn off the supply line (1) and routed to a second semiconductor application (14) across a pressure-reduction device (12) thereby reducing the temperature and pressure of the second gas, entering the second semiconductor application.
