发明名称 |
Microelectromechanical system pressure sensor and method for making and using |
摘要 |
According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate and (ii) deformable in response to a pressure.
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申请公布号 |
US2006260410(A1) |
申请公布日期 |
2006.11.23 |
申请号 |
US20060495317 |
申请日期 |
2006.07.31 |
申请人 |
FORTIN JEFFREY;KISHORE KUNA;SUBRAMANIAN KANAKASABAPATHI |
发明人 |
FORTIN JEFFREY;KISHORE KUNA;SUBRAMANIAN KANAKASABAPATHI |
分类号 |
G01L7/00;G01L1/14;G01L9/00 |
主分类号 |
G01L7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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