MEASURING ELEMENT FOR A MICROELECTRONIC SENSOR

摘要

The invention relates to microelectronic engineering, in particular to measuring elements for microelectronic sensors which are provided with substrates in the form of thin-film dielectric membranes and used for measuring concentrations of toxic and explosive impurities in air, gas flowrate, pressure, etc. The aim of said invention is to enable all layers of the measuring element to be pasted to each other at a temperature of ~ 1000 °C, to provide a heater with a heat insulation when it is heated to a temperature of ~ 1000 °C, thereby increasing the performance reliability of the measuring element, extending the operating capabilities and production effectiveness thereof. For this purpose, the inventive measuring element for the microelectronic sensor comprises a substrate provided with a hole, a dielectric membrane and processing and functional layers, wherein the substrate with the preliminary produced hole is made of a ceramic material whose aluminium oxide content is equal to or greater than 90 % and the dielectric membrane is embodied in the form of a aluminium oxide film which is rigidly fixed to the substrate with the aid of a high-temperature adhesive. Said high-temperature adhesive can be embodied in the form of glass whose thermal expansion coefficient differs from the aluminium oxide thermal expansion coefficient by a value equal to or less than 10 %. The dielectric membrane can be embodied in a form of a free polycrystalline ceramic film whose thickness ranges from 10 to 100 microns and which is produced by aluminium electro-spark oxidation.