| 摘要 |
PROBLEM TO BE SOLVED: To provide a pod opening/closing device for an SMIF capable of opening/closing a semiconductor wafer pod comprising a different lock means using the same device. SOLUTION: An opening/closing device 100 of an SMIF pod comprises a stage 110 on which a plurality of SMIF pods of different size can be loaded, and an opening/closing mechanism capable of opening/closing all locks of a plurality of SMIF pods comprising different lock means, allowing all SMIF pods to be opened/closed by the same device. COPYRIGHT: (C)2007,JPO&INPIT
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