发明名称 |
Method for decreasing chemical diffusion in parylene and trapping at parylene-to-parylene interfaces |
摘要 |
Systems and methods for improving the adherence of poorly-adherent parylene-to-parylene films or layers and/or altering the water and chemical permeability of the parylene layers. A device having two or more parylene layers is heated in a reduced pressure treatment chamber at a temperature above the deposition temperature of the parylene (e.g., from about room temperature to several hundreds of degrees Celsius) for an extended period of time (e.g., a few hours up to several days). The methods of the present invention have been shown to convert poorly-adherent and/or water-permeable films to optimally-adherent and/or relatively water-impermeable films.
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申请公布号 |
US2006255293(A1) |
申请公布日期 |
2006.11.16 |
申请号 |
US20060408809 |
申请日期 |
2006.04.21 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
TAI YU-CHONG;RODGER DAMIEN C.;LI WEN;TOOKER ANGELA |
分类号 |
G21G5/00;C23C16/00 |
主分类号 |
G21G5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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