发明名称 Compensation of turbulent effects of gas in measurement paths of multi-axis interferometers
摘要 In general, in a first aspect, the invention features a method that includes using an interferometry assembly to provide three different output beams, each output beam including an interferometric phase related to an optical path difference between a corresponding first beam and a corresponding second beam, each first beam contacting a measurement object at least once, monitoring the interferometric phases for each of the three different output beams, and deriving information about variations in the optical properties of a gas in the first beam paths from the three monitored phases.
申请公布号 US2006256346(A1) 申请公布日期 2006.11.16
申请号 US20060413917 申请日期 2006.04.28
申请人 HILL HENRY A 发明人 HILL HENRY A.
分类号 G01B11/02;G01N21/41 主分类号 G01B11/02
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