Electrostatically actuated micro-electro-mechanical system (MEMS) device,申请号EP20010310931-传众专利搜索

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发明名称	Electrostatically actuated micro-electro-mechanical system (MEMS) device
摘要
申请公布号	EP1223453(B1)	申请公布日期	2006.11.15
申请号	EP20010310931	申请日期	2001.12.28
申请人	AGERE SYSTEMS GUARDIAN CORPORATION;LUCENT TECHNOLOGIES INC.	发明人	AKSYUK, VLADIMIR ANATOLYEVICH;BOLLE, CHRISTIAN A.;PARDO, FLAVIO
分类号	G02B26/08;B81B3/00;B81B7/02	主分类号	G02B26/08
代理机构		代理人
主权项
地址

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