A method for controlling pellicle attachment apparatus is provided to uniformly adhere pellicle to photo-mask in correct position thereof by indicating control items and values through touch-panel to a user and feed-backing output value of a servo-motor to control the servo-motor. The control method comprises the steps of: (1) loading photo-mask in a mask holder depending on operation of a worker; (2) loading pellicle in a pellicle door depending on the operation; (3) adjusting position of the mask holder by actuating a stepping motor by the worker; (4) determining whether run-start instruction is inputted by the worker; (5) forward driving the pellicle door arm and a back door arm in the mask holder direction by controlling a servo-motor if the instruction is inputted; (6) controlling the servo-motor based on position and velocity data setup by the worker by feeding back output of the servo-motor; (7) adhering pellicle with pressurized pressure through touch-panel when the servo-motor is controlled according to the position and velocity data; and (8) backward driving the pellicle door arm and the back door arm after adhesion of the pellicle.
