| 摘要 |
PROBLEM TO BE SOLVED: To provide a lighting system capable of keeping the permeation characteristics substantially constant before and after inserting an optical filter into an optical path. SOLUTION: The lighting system comprises optical systems 12 and 14-16 for guiding illumination light from a light source 11 to a light radiated face (inspected surface of a substrate 10A), optical filters 13, 17, etc. movable between the inside and outside of the optical path of the illumination light, and regulating means 20 and 21 for adjusting the temperature so that the temperatures of the optical filters are equal inside and outside the optical path. COPYRIGHT: (C)2007,JPO&INPIT
|
