| 摘要 |
In a process for manufacturing an integrated differential pressure sensor, the steps of: forming, in a monolithic body (30) of semiconductor material having a first face (30a) and a second face (30b), a cavity (36) extending at a distance from the first face (30a) and delimiting therewith a flexible membrane (37); forming an access passage (42; 42, 44), in fluid communication with the cavity (36); and forming, in the flexible membrane (37), at least one transduction element (38, 72) configured so as to convert a deformation of the flexible membrane (37) into electrical signals. The cavity (36) is formed in a position set at a distance from the second face (30b) and delimits, together with the second face (30b), a portion of the monolithic body (30). In order to form the access passage (42; 42, 44), the monolithic body (30) is etched so as to form an access trench (42) extending through it. |
