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经营范围
发明名称
Corpuscular beam device
摘要
申请公布号
EP1052679(B1)
申请公布日期
2006.11.08
申请号
EP19990108986
申请日期
1999.05.06
申请人
ADVANTEST CORPORATION
发明人
FROSIEN, JUERGEN, DR.
分类号
H01J37/244;H01J37/28;H01J37/141;H01J37/145
主分类号
H01J37/244
代理机构
代理人
主权项
地址
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