CRUCIBLE OF VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION SOURCE HAVING THE SAME

摘要

A crucible of a vacuum deposition apparatus and a vapor deposition source using the same are provided to realize a uniform consumption of a predetermined material by using an improved arrangement of a spraying nozzle and a tilted inner bottom of the crucible. A crucible(220) has an inner space capable of storing a deposition material. A spraying nozzle(240) is connected through the crucible in order to spray the deposition material onto an aiming portion. The crucible includes a predetermined inner bottom portion. The predetermined inner bottom portion of the crucible has a slope. The spraying nozzle is installed at an upper portion of the crucible. The upper portion is higher than the center of the crucible.