发明名称 CLEANING PROTECTION JIG
摘要 PROBLEM TO BE SOLVED: To provide a cleaning protection jig for cleaning an tubular work having a metal member to be protected on the outer surface e.g. metal cooling pipe without attaching a cleaning solution to the metal member to avoid contaminating the inner surface of the tubular work with the metal. SOLUTION: The cleaning protection jig for cleaning the inner surface of an tubular work M having a metal member 28 to be protected on the outer surface with a cleaning solution is composed of a nonmetal-made tubular protection cover 62 capable of housing the work already covering the metal member, and a nonmetal-made cap 64 removably provided on at least either end of the protection cover for closing an annular opening formed between the outer side surface of the work and the opening end of the protection cover with tightly sealed structure from liquid. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006303123(A) 申请公布日期 2006.11.02
申请号 JP20050121689 申请日期 2005.04.19
申请人 TOKYO ELECTRON LTD 发明人 TANAKA KIYOSHI;YONEDA MASATAKE
分类号 H01L21/304;B08B13/00 主分类号 H01L21/304
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