| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a low-resistance conductive film having a stable electrical characteristic by using a liquid phase method. <P>SOLUTION: This formation method of a conductive film includes processes of: arranging a liquid material 12 containing a fine particle material on a substrate P; and forming the conductive film by baking the liquid material 12 on the substrate P by light radiation using a flash lamp. <P>COPYRIGHT: (C)2007,JPO&INPIT |
