| 摘要 |
PROBLEM TO BE SOLVED: To provide a method where, in an etching compositional liquid comprising cupric chloride, hydrogen chloride and a 2-aminobenzothiazole compound (I), the quantity of the 2-aminobenzothiazole compound (I) can be determined. SOLUTION: In the determining method, from the intensity of a peak exhibiting the absorption maximum in the vicinity of the wavelength of 285 nm in the ultraviolet light absorption spectrum of an etching compositional liquid, the concentration is measured. For example, when a hydrogen peroxide solution, hydrogen chloride solution and a 2-aminobenzothiazole compound (I) are added to an etching compositional liquid after etching, so as to regenerate the same, the quantity of the 2-aminobenzothiazole compound (I) is determined, and, based on the obtained value, the amount of the 2-aminobenzothiazole (I) to be added is determined. By the regenerated etching compositional liquid, a copper thin film (4) is etched, thus a copper printed wiring board (1) can be produced. COPYRIGHT: (C)2007,JPO&INPIT
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