发明名称 |
Atomic force microscope with probe with improved tip movement |
摘要 |
An atomic force microscope probe provides an indentation testing function in a direction along an axis. The probe has a tip and an arm structure holding the tip. The arm structure has one end mounted on a fixed stage, the other end coupled to the AFM tip, and a hollow frame having a shape symmetric with respect to a plane including an axis on which the two ends are positioned.
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申请公布号 |
US2006243036(A1) |
申请公布日期 |
2006.11.02 |
申请号 |
US20060455353 |
申请日期 |
2006.06.19 |
申请人 |
LEE HAK-JOO;KIM JAE-HYUN;OH CHUNG-SEOG;HAN SEUNG-WOO;HUR SHIN;KO SOON-GYU;CHOI BYUNG-IK |
发明人 |
LEE HAK-JOO;KIM JAE-HYUN;OH CHUNG-SEOG;HAN SEUNG-WOO;HUR SHIN;KO SOON-GYU;CHOI BYUNG-IK |
分类号 |
G01B5/28;G01N3/02;G01N3/42;G01Q10/00;G01Q60/24;G01Q60/38 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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