| 摘要 |
PROBLEM TO BE SOLVED: To easily position a backing plate 21 in the x-direction along the width of a bevel, the backing plate 21 having the length extending over the whole length of the bevel extending in the y-direction. SOLUTION: A backing plate device comprises: a backing plate 21 extending in the horizontal y-direction; three or more backing plate supporting devices 12 to 15 which support the backing plate from below, and have backing plate elevating mechanisms and backing plate horizontal x-direction driving mechanisms respectively, and are distributed in the horizontal y-direction; and a backing plate x-direction driving device 100, in which when among a group of the backing plate supporting devices, an x driving mechanism 12M of the supporting device 12 arranged at one end portion in the y-direction does not operate but an x driving mechanism 15M of the supporting device 15 arranged at the other end portion operates, x driving mechanisms 13M, 14M of the supporting devices 13, 14 arranged between the supporting devices 12, 15 arranged at both end portions simultaneously operate at the speeds of the products of the ratios, L1/(L1+L2+L3) and (L1+L2)/(L1+L2+L3), of the distances, L1, L1+L2, from the supporting device 12 arranged at the one end portion to the y-direction distance, L1+L2+L3, between the supporting devices 12, 15 arranged at both end portions and the driving speed of the supporting device 15 arranged at the other end portion. COPYRIGHT: (C)2007,JPO&INPIT
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