发明名称
摘要 A positive resist composition comprising (A) a resin, which is decomposed by the action of an acid to increase solubility in an alkali developing solution, having a repeating unit represented by formula (Y) defined in the specification, (B) a compound capable of generating an acid upon irradiation of an actinic ray or radiation, and (C) a solvent.
申请公布号 JP3841400(B2) 申请公布日期 2006.11.01
申请号 JP20020049963 申请日期 2002.02.26
申请人 发明人
分类号 G03F7/039;G03F7/004;H01L21/027 主分类号 G03F7/039
代理机构 代理人
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地址