发明名称 SAND PAPER ADHERING APPARATUS
摘要 A sand paper adhering apparatus is provided to prevent a convex-concave generation due to flow in of particle or bubble by attaching a sand paper on a plate of a sanding unit using the sand paper adhering apparatus. A paper clamping roller(11) is attached to one end of a sand paper, and rotated while clamping the sand paper. A support frame(12) supports the paper clamping roller in order to rotate the paper clamping roller. A paper forceps(14) is prepared to pick up the other end of the paper. A spring for fixing the forceps(15) is prepared. One end of the spring is connected to the wafer forceps and the other end of the spring is connected to the support frame, in order to support the paper forceps.
申请公布号 KR20060111803(A) 申请公布日期 2006.10.30
申请号 KR20050034173 申请日期 2005.04.25
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, SANG WON
分类号 H01L21/66 主分类号 H01L21/66
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