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发明名称
Method for forming capacitor of semiconductor device
摘要
申请公布号
KR100639207(B1)
申请公布日期
2006.10.30
申请号
KR20040090414
申请日期
2004.11.08
申请人
发明人
分类号
H01L27/108;H01L21/8242
主分类号
H01L27/108
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代理人
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地址
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