| 摘要 |
An upgrade apparatus of a wire bonding machine is provided to constantly keep temperature of a transducer horn in a wire boding process by variably spraying air of the natural temperature to the transducer horn in the wire bonding process. A first temperature detecting unit(142a) detects periphery temperature of a transducer horn installed on a bond head. The first temperature detecting unit converts the detected temperature into a certain electrical signal to output. A second temperature detecting unit(148a) detects periphery temperature of the bond head and an image processing unit and converts it into a certain electrical signal to output. A central controller(149) determines air amount to spray to the transducer horn, the bond bead, and the image processing unit by using output signals of the first temperature detecting unit and the second temperature detecting unit as input signals. A first air spraying unit(146c) variably sprays air of the normal temperature to the transducer horn by an output signal of the central controller. A second air spraying unit(146d) regularly sprays heated air in a certain temperature to the bond head and the image processing unit by the output signal of the central controller. A radiating heater(148d) heats and sprays the air sprayed through the second air spraying unit heat in a certain temperature. |
